Mini-Akku mit 3D-Lithografie
Micro-scale devices typically utilize power supplied off-chip because of difficulties in miniaturizing energy storage technologies. A miniaturized high-energy and high-power on-chip battery would be highly desirable for applications including autonomous microscale actuators, distributed wireless sensors and transmitters, monitors, and portable and implantable medical devices.
Due to the complexity of 3D electrodes, it is generally difficult to realize such batteries, let alone the possibility of on-chip integration and scaling. The project developped an effective method to make high-performance 3D lithium-ion microbatteries using processes that are highly compatible with the fabrication of microelectronics.
3D holographic lithography was utilized to define the interior structure of electrodes and 2D photolithography to create the desired electrode shape. This work merges important concepts in fabrication, characterization, and modeling, showing that the energy and power of the microbattery are strongly related to the structural parameters of the electrodes such as size, shape, surface area, porosity, and tortuosity. A significant strength of this new method is that these parameters can be easily controlled during lithography steps, which offers unique flexibility for designing next-generation on-chip energy storage devices.
Enabled by a 3D holographic patterning technique—where multiple optical beams interfere inside the photoresist creating a desirable 3D structure—the battery possesses well-defined, periodically structured porous electrodes, that facilitates the fast transports of electrons and ions inside the battery, offering supercapacitor-like power.
Although accurate control on the interfering optical beams is required to construct 3D holographic lithography, recent advances have significantly simplified the required optics, enabling creation of structures via a single incident beam and standard photoresist processing. This makes it highly scalable and compatible with microfabrication.
Micro-engineered battery architectures, combined with high energy material such as tin, offer exciting new battery features including high energy capacity and good cycle lives, which provide the ability to power practical devices.